JPH0414511B2 - - Google Patents

Info

Publication number
JPH0414511B2
JPH0414511B2 JP59054137A JP5413784A JPH0414511B2 JP H0414511 B2 JPH0414511 B2 JP H0414511B2 JP 59054137 A JP59054137 A JP 59054137A JP 5413784 A JP5413784 A JP 5413784A JP H0414511 B2 JPH0414511 B2 JP H0414511B2
Authority
JP
Japan
Prior art keywords
region
source
pad
large area
base region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59054137A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59214254A (ja
Inventor
Ridoo Arekusandaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTAANASHONARU REKUCHIFUAIYAA CORP
Original Assignee
INTAANASHONARU REKUCHIFUAIYAA CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23894146&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0414511(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by INTAANASHONARU REKUCHIFUAIYAA CORP filed Critical INTAANASHONARU REKUCHIFUAIYAA CORP
Publication of JPS59214254A publication Critical patent/JPS59214254A/ja
Publication of JPH0414511B2 publication Critical patent/JPH0414511B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/665—Vertical DMOS [VDMOS] FETs having edge termination structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/393—Body regions of DMOS transistors or IGBTs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
    • H10D64/251—Source or drain electrodes for field-effect devices
    • H10D64/252—Source or drain electrodes for field-effect devices for vertical or pseudo-vertical devices

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
JP59054137A 1983-03-21 1984-03-21 高出力ｍｏｓｆｅｔ Granted JPS59214254A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/477,012 US4789882A (en) 1983-03-21 1983-03-21 High power MOSFET with direct connection from connection pads to underlying silicon
US477012 1983-03-21

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP5163306A Division JP2760734B2 (ja) 1983-03-21 1993-06-08 縦方向導電性高出力ｍｏｓｆｅｔ

Publications (2)

Publication Number Publication Date
JPS59214254A JPS59214254A (ja) 1984-12-04
JPH0414511B2 true JPH0414511B2 (en]) 1992-03-13

Family

ID=23894146

Family Applications (2)

Application Number Title Priority Date Filing Date
JP59054137A Granted JPS59214254A (ja) 1983-03-21 1984-03-21 高出力ｍｏｓｆｅｔ
JP5163306A Expired - Lifetime JP2760734B2 (ja) 1983-03-21 1993-06-08 縦方向導電性高出力ｍｏｓｆｅｔ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP5163306A Expired - Lifetime JP2760734B2 (ja) 1983-03-21 1993-06-08 縦方向導電性高出力ｍｏｓｆｅｔ

Country Status (8)

Country Link
US (1) US4789882A (en])
JP (2) JPS59214254A (en])
KR (1) KR890004548B1 (en])
DE (1) DE3410427A1 (en])
FR (1) FR2543366B1 (en])
GB (1) GB2137811B (en])
IT (1) IT1173885B (en])
SE (1) SE8401090L (en])

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4789882A (en) * 1983-03-21 1988-12-06 International Rectifier Corporation High power MOSFET with direct connection from connection pads to underlying silicon
US4631564A (en) * 1984-10-23 1986-12-23 Rca Corporation Gate shield structure for power MOS device
JP2572210B2 (ja) * 1984-11-20 1997-01-16 三菱電機株式会社 縦型パワ−ｍｏｓ電界効果型半導体装置
US4798810A (en) * 1986-03-10 1989-01-17 Siliconix Incorporated Method for manufacturing a power MOS transistor
US4775879A (en) * 1987-03-18 1988-10-04 Motorola Inc. FET structure arrangement having low on resistance
GB2209433B (en) * 1987-09-04 1990-06-13 Plessey Co Plc Semi-conductor devices
JP2550702B2 (ja) * 1989-04-26 1996-11-06 日本電装株式会社 電力用半導体素子
US5313088A (en) * 1990-09-19 1994-05-17 Nec Corporation Vertical field effect transistor with diffused protection diode
US5404040A (en) * 1990-12-21 1995-04-04 Siliconix Incorporated Structure and fabrication of power MOSFETs, including termination structures
US5304831A (en) * 1990-12-21 1994-04-19 Siliconix Incorporated Low on-resistance power MOS technology
US5430314A (en) * 1992-04-23 1995-07-04 Siliconix Incorporated Power device with buffered gate shield region
US5798287A (en) * 1993-12-24 1998-08-25 Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno Method for forming a power MOS device chip
DE69321966T2 (de) * 1993-12-24 1999-06-02 Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno, Catania Leistungs-Halbleiterbauelement
DE69321965T2 (de) * 1993-12-24 1999-06-02 Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno, Catania MOS-Leistungs-Chip-Typ und Packungszusammenbau
DE69418037T2 (de) * 1994-08-02 1999-08-26 Consorzio Per La Ricerca Sulla Microelettronica Ne Leistungshalbleitervorrichtung aus MOS-Technology-Chips und Gehäuseaufbau
US5701023A (en) * 1994-08-03 1997-12-23 National Semiconductor Corporation Insulated gate semiconductor device typically having subsurface-peaked portion of body region for improved ruggedness
DE19740904B4 (de) * 1997-09-17 2004-10-28 Infineon Technologies Ag Verfahren zum Beseitigen von Sauerstoff-Restverunreinigungen aus tiegelgezogenen Siliziumwafern
US6707103B1 (en) * 1998-03-05 2004-03-16 International Rectifier Corporation Low voltage rad hard MOSFET
US6545316B1 (en) 2000-06-23 2003-04-08 Silicon Wireless Corporation MOSFET devices having linear transfer characteristics when operating in velocity saturation mode and methods of forming and operating same
US6476456B1 (en) * 1999-06-10 2002-11-05 International Rectifier Corporation Integrated radiation hardened power mosgated device and schottky diode
JP4122113B2 (ja) 1999-06-24 2008-07-23 新電元工業株式会社 高破壊耐量電界効果型トランジスタ
US6784486B2 (en) * 2000-06-23 2004-08-31 Silicon Semiconductor Corporation Vertical power devices having retrograded-doped transition regions therein
US6781194B2 (en) * 2001-04-11 2004-08-24 Silicon Semiconductor Corporation Vertical power devices having retrograded-doped transition regions and insulated trench-based electrodes therein
US20030091556A1 (en) * 2000-12-04 2003-05-15 Ruoslahti Erkki I. Methods of inhibiting tumor growth and angiogenesis with anastellin
TWI236134B (en) 2001-04-04 2005-07-11 Mitsubishi Electric Corp Semiconductor device
JP4198469B2 (ja) * 2001-04-11 2008-12-17 シリコン・セミコンダクター・コーポレイション パワーデバイスとその製造方法
US6852634B2 (en) * 2002-06-27 2005-02-08 Semiconductor Components Industries L.L.C. Low cost method of providing a semiconductor device having a high channel density
US6870221B2 (en) 2002-12-09 2005-03-22 Semiconductor Components Industries, Llc Power switching transistor with low drain to gate capacitance
US7385273B2 (en) * 2005-06-10 2008-06-10 International Rectifier Corporation Power semiconductor device
WO2007007670A1 (ja) * 2005-07-08 2007-01-18 Matsushita Electric Industrial Co., Ltd. 半導体装置および電気機器
JP2006310838A (ja) * 2006-04-05 2006-11-09 Hvvi Semiconductors Inc パワー半導体装置およびそのための方法
US9484451B2 (en) 2007-10-05 2016-11-01 Vishay-Siliconix MOSFET active area and edge termination area charge balance
US9431249B2 (en) 2011-12-01 2016-08-30 Vishay-Siliconix Edge termination for super junction MOSFET devices
US8841718B2 (en) 2012-01-16 2014-09-23 Microsemi Corporation Pseudo self aligned radhard MOSFET and process of manufacture
US9614043B2 (en) 2012-02-09 2017-04-04 Vishay-Siliconix MOSFET termination trench
US9842911B2 (en) 2012-05-30 2017-12-12 Vishay-Siliconix Adaptive charge balanced edge termination
US9508596B2 (en) 2014-06-20 2016-11-29 Vishay-Siliconix Processes used in fabricating a metal-insulator-semiconductor field effect transistor
US9887259B2 (en) 2014-06-23 2018-02-06 Vishay-Siliconix Modulated super junction power MOSFET devices
CN106575666B (zh) 2014-08-19 2021-08-06 维西埃-硅化物公司 超结金属氧化物半导体场效应晶体管
JP2019165182A (ja) * 2018-03-20 2019-09-26 株式会社東芝 半導体装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3271201A (en) * 1962-10-30 1966-09-06 Itt Planar semiconductor devices
US3812521A (en) * 1973-02-16 1974-05-21 Motorola Inc Bonding pad substructure for integrated circuits
NL7606483A (nl) * 1976-06-16 1977-12-20 Philips Nv Inrichting voor het mengen van signalen.
JPS54112179A (en) * 1978-02-23 1979-09-01 Sony Corp Semiconductor device
JPS5578563A (en) * 1978-12-08 1980-06-13 Mitsubishi Electric Corp Semiconductor device
JPS5655066A (en) * 1979-10-11 1981-05-15 Nec Corp Semiconductor device
DE3072002D1 (en) * 1979-11-14 1987-09-10 Fujitsu Ltd An output transistor of a ttl device with a means for discharging carriers
US4593302B1 (en) * 1980-08-18 1998-02-03 Int Rectifier Corp Process for manufacture of high power mosfet laterally distributed high carrier density beneath the gate oxide
DE3103444A1 (de) * 1981-02-02 1982-10-21 Siemens AG, 1000 Berlin und 8000 München Vertikal-mis-feldeffekttransistor mit kleinem durchlasswiderstand
JPS57206073A (en) * 1981-06-12 1982-12-17 Hitachi Ltd Mis semiconductor device
JPS5825264A (ja) * 1981-08-07 1983-02-15 Hitachi Ltd 絶縁ゲート型半導体装置
DE3346286A1 (de) * 1982-12-21 1984-06-28 International Rectifier Corp., Los Angeles, Calif. Hochleistungs-metalloxid-feldeffekttransistor- halbleiterbauteil
US4789882A (en) * 1983-03-21 1988-12-06 International Rectifier Corporation High power MOSFET with direct connection from connection pads to underlying silicon
US4631564A (en) * 1984-10-23 1986-12-23 Rca Corporation Gate shield structure for power MOS device
JP2559801B2 (ja) * 1988-03-30 1996-12-04 日産自動車株式会社 パワートランジスタ

Also Published As

Publication number Publication date
US4789882A (en) 1988-12-06
GB2137811A (en) 1984-10-10
FR2543366B1 (fr) 1985-12-13
KR840008222A (ko) 1984-12-13
GB8406974D0 (en) 1984-04-18
JPH06318708A (ja) 1994-11-15
IT1173885B (it) 1987-06-24
DE3410427C2 (en]) 1990-02-01
GB2137811B (en) 1987-01-07
KR890004548B1 (ko) 1989-11-13
DE3410427A1 (de) 1984-09-27
SE8401090L (sv) 1984-09-22
FR2543366A1 (fr) 1984-09-28
SE8401090D0 (sv) 1984-02-28
JP2760734B2 (ja) 1998-06-04
JPS59214254A (ja) 1984-12-04
IT8420126A0 (it) 1984-03-19

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